Fault Detection & Classification Benchmarks
FDC is Necessary but NOT SUFFICIENT
The challenges facing standard (unsupervised) statistical fault detection:
- Amount of process signal data in fabs is rapidly increasing
- The more data available, the more likely there are false alarms
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Fundamental Issues
- Control is not based on yield - therefore there is no systematic way to prioritize FDC monitors based on product impact
- Poor infrastructure - FDC and YMS are in separate databases without alignment from the process perspective, and therefore difficult to check product impact in real time