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A software system for monitoring trace data generated by fab manufacturing equipment

ModelWare™ is a comprehensive software solution for monitoring trace data generated by fab manufacturing equipment. ModelWare® allows manufacturers to set limits and trigger alarms when tools are operating outside of their intended limits. This enables equipment operators and factory managers to decrease down-time for product manufacturing tools. Factories benefit from reduced wafer scrap and a reduced need to run non-product wafers to monitor tool performance.

  • Fab-wide common equipment monitoring environment - ModelWare™ links to almost all types of fab equipment based on a SECS/HSMS interface or other custom interface hardware. By linking to a wide range of complex fab tools, ModelWare™ enables limits and alarms to be managed in a common environment.
  • Trace data archiving - ModelWare™ maintains an archive of trace data for each equipment signal being monitored. This enables analysis and signal overlay comparisons.
  • Statistical analysis capabilities - ModelWare™ is capable of performing basic statistical analysis functions for reviewing time series data. In addition, ModelWare™ includes Universal Process Modeling (UPM). UPM allows correlated signals to be compared to test results for deviations among related signals.
  • Reporting capabilities - ModelWare™ enables centralized configuration of user reports to provide operators and managers with a dashboard-based view of factory tool performance. And system administration reports enable users to monitor the status of ModelWare™ data collection and processing.

ModelWare™ pioneered the market for software-based equipment monitoring in the semiconductor industry. The system has been installed in over 30 different factories worldwide, including semiconductor factories, flat panel display factories, and raw wafer production factories.

Contact us to discover more about how PDF Solutions can address your critical issues throughout the IC Manufacturing Process Life Cycle.