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Standards
Front End Process Standards
Standard
SEMI E168 – Specification for Product Time Measurement
Standard
SEMI E148 – Time Synchronization and the TS-Clock Object
Standard
SEMI E134 – Data Collection Management
Standard
SEMI E121 – XML Style and Usage for Semiconductor Manufacturing
Standard
SEMI E120 – Specification for the Common Equipment Model (CEM)
Standard
SEMI E142 – Specification for Substrate Mapping
Standard
SEMI E94 – Specification for Control Job Management
Standard
SEMI E87 – Specification for Carrier Management (CMS)
Standard
SEMI E5 – Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II)
Standard
SEMI E37 – Specification for High-Speed SECS Message Services (HSMS) Generic Services
Standard
SEMI E30 – Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM)
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