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Standards
Standard
SEMI E88 – Specification for AMHS Storage SEM (Stocker SEM)
Standard
SEMI E82 – Specification for Interbay/Intrabay AMHS
Standard
SEMI E190 – Equipment Data Publication (EDP)
Standard
SEMI E168 – Specification for Product Time Measurement
Standard
SEMI E148 – Time Synchronization and the TS-Clock Object
Standard
SEMI E134 – Data Collection Management
Standard
SEMI E130 – Prober Specific Equipment Model for 300mm Semiconductor Manufacturing (PSEM300)
Standard
SEMI E123 – Handler Specific Equipment Model (HSEM)
Standard
SEMI E122 – Tester Specific Equipment Model (TSEM)
Standard
SEMI E121 – XML Style and Usage for Semiconductor Manufacturing
Standard
SEMI E120 – Specification for the Common Equipment Model (CEM)
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