Introduction to the SEMI E192 Standard
SEMI E192 serves as a strategic guide for navigating the approximately 70 SEMI standards associated with GEM (Generic Equipment Model) technology. Even for seasoned professionals, determining when and how to implement each standard can be complex. This guide simplifies the process by organizing the standards into logical categories and offering practical recommendations for their adoption.
Purpose of the SEMI E192 Standard
The primary objective of SEMI E192 is to provide a structured approach to implementing SEMI E30 GEM and related standards. It categorizes the standards and offers guidance based on equipment type, industry requirements, and implementation conditions. The guide is organized into the following sections:
- Core GEM Standards
Covers foundational standards including protocol alternatives, the SECS-II message layer (SEMI E5), GEM (SEMI E30), and implementation guidance for SECS-II and GEM capabilities. - GEM 300 Standards
Defines the set of standards required for GEM 300 compliance, commonly used in semiconductor manufacturing environments. - Additional GEM-Related Standards
Includes supplementary standards that define additional state models notification messages and data elements for GEM interfaces. The guide identifies standards that are recommended for all equipment, those to avoid, and others that should be implemented under specific conditions. - Specific Equipment Model (SEM) Standards
Tailored standards for particular equipment types. For example, SEMI E88 is recommended for stockers. - Industry-Specific Standards
Highlights standards developed for industries such as High Brightness LED, Printed Circuit Board (PCB), and Photovoltaics (PV). These standards build on GEM by adding constraints that simplify development and factory integration. - Inactive GEM-Based Standards
Standards that have not been updated, revised, or reaffirmed within a five-year period are considered inactive. SEMI E192 does not recommend implementing these standards.
Why is the SEMI E192 Standard Important to the Industry?
SEMI E192 is a vital implementation guide for both newcomers and experienced professionals working with GEM technology. It is the?only SEMI standard?that formally defines the complete set of GEM 300 standards, providing clarity and structure in an otherwise complex landscape. Additionally, SEMI E192 is the?sole resource?within the SEMI standards portfolio that explains how the various GEM-related standards interconnect, making it an indispensable reference for effective and consistent implementation.
PDF Solutoins Products Supporting SEMI E192
Cimetrix offers several products specifically designed to implement and maximize the benefits of SEMI E30:
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Equipment-Side
- Cimetrix CIMConnect: Provides an SECS/GEM interface for equipment suppliers, enabling seamless communication with factory hosts.
- Cimetrix CIM300: Supports GEM300 standards compliance for 300mm fabs, combining GEM, E87, E90, and other standards.
- Cimetrix CIMControlFramework: A complete software framework for equipment automation systems, designed to integrate seamlessly with SEMI standards.
- Cimetrix EquipmentConnect: A powerful software toolkit engineered for seamless implementation of SEMI GEM, GEM300, and EDA/Interface A standards
Factory-Side
- Sapience Data Platform: A host-side solution supporting SEMI standards, enabling efficient factory host operations.
- Cimetrix HostConnect: An enhanced software library for creating host applications using SECS-II messaging over HSMS.
- Cimetrix SECSConnect: A library for creating applications using SECS-II messaging over SECS-I or HSMS.
Test
- Cimetrix EquipmentTest: A comprehensive SECS/GEM testing solution engineered to validate equipment interface compliance with SEMI standards and streamline integration with factory host systems.