The Evolution of AI Applications for Process Control
Speaker: Jon Holt, PDF Solutions
Abstract:
AI is any technique that enables computers to mimic human intelligence, using logic, if-then rules, decision trees, machine learning, deep learning, and generative AI techniques. AI applications have been successfully deployed in semiconductor manufacturing over the last 25+ years for process control and manufacturing variability reduction (SPC, APC, R2R, RTD, OCAPS, etc.).
This paper describes those applications, the components required to implement those applications, new and future capabilities, and how they are being incorporated into Smart Manufacturing and Enterprise level control systems using modern AI, agents, and digital twins to maximize ROI (Return on Investment) and enhance process control at all levels in semiconductor manufacturing.
Semiconductor manufacturers and equipment OEM’s have built a wide variety of AI and Machine Learning solutions that have been effective at reducing variability, costs, and improving yield. However, there are many AI tools specifically designed for point solutions or only available on specific equipment manufacturers tools. The innovation in the presented approach is the utilization of GenAI LLM’s to link the outputs of each AI model through LLM and interactive Agentic AI agents. This solution solves many of the IP protection and security concerns and enables information/results sharing as well as reinforcement learning across these AI siloes for continuous learning, feedback, and control.
Results show this modern AI system can effectively connect manufacturing and other supply chain data together in a digital twin leveraging subject matter experts to ‘teach’ the model to operate with minimal human involvement to enable faster decisions and better control systems. Results show >50% improvement in engineering efficiency, >10% decrease in MTTR (time to repair), and an increase in overall factory efficiency (OFE/OEE).
Keywords: Process Control, AI/MOL, Agentic AI, Overall Factory Efficiency (OEE)
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