Keynotes & Papers

Published Paper

SPIE 2009 – OPC Simplification and Mask Cost Reduction Using Regular Design Fabrics

Design for Manufacturing

Yield Management

Published Paper

ISSM 2008 – BEOL parametric variation control with FDC data

Yield Management

Predictive Learning

FDC

Published Paper

IEEE Transactions 2008 – Variation in Transistor Performance and Leakage in Nanometer-Scale Technologies

Design for Manufacturing

Characterization

Yield Management

Published Paper

ASMC 2007 – Yield Modeling with Rule Ensembles

Predictive Learning

Yield Management

Published Paper

ICMTS 2006 – Scribe Characterization Vehicle Test Chip for Ultra-Fast Product Wafer Yield Monitoring

Yield Management

Characterization

Published Paper

ISSM 2006 – Method for fast and accurate calibration of litho simulator for hot spot analysis

Yield Management

Characterization

Design for Manufacturing