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  • Why PDF Solutions
  • Products
    • Exensio® Analytics Platform
      • Exensio Battery
    • Sapience™
    • Advanced Insights for Manufacturing
    • Design-for-Inspection™ System
    • Characterization Vehicle® System
    • secureWISE®
    • Cimetrix® Connectivity & Control
    • Industry Standards
    • Technology
    • Partners
  • Services
    • Overview
    • Integrated Yield Ramp
    • Professional Services
    • Value Added Services
  • Resources
    • All Resources
    • Press Releases
    • Blog
    • Users Conferences
    • Keynotes & Papers
    • White Papers & eBooks
    • News
    • Events
    • Webinars
    • Videos
    • Applications
    • Training
  • Company
    • Overview
    • Management Team
    • Board of Directors
    • Corporate Governance
    • Careers
    • Investor Relations
    • Locations
    • Trust Center

Standards

Standard

SEMI E120 – Specification for the Common Equipment Model (CEM)

EDA/Interface A

Standard

SEMI E142 – Specification for Substrate Mapping

Traceability

Standard

SEMI E94 – Specification for Control Job Management

GEM300

Standard

SEMI E87 – Specification for Carrier Management (CMS)

GEM300

Standard

SEMI E5 – Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II)

SECS/GEM

Standard

SEMI E37 – Specification for High-Speed SECS Message Services (HSMS) Generic Services

SECS/GEM

Standard

SEMI E30 – Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM)

SECS/GEM

Standard

SEMI E192 – Guide for Equipment Adoption Criteria for GEM and GEM-related Standards

GEM300
,
SECS/GEM

Standard

SEMI E191 – Specification for Computing Device Cybersecurity Status Reporting

Cybersecurity

Standard

SEMI E187 – Specification for Cybersecurity of Fab Equipment

Cybersecurity

Standard

SEMI E172 – Specification for SECS Equipment Data Dictionary (SEDD)

SECS/GEM

Standard

SEMI E128 – Specification for XML Message Structures

EDA/Interface A

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Standards Categories

  • Traceability
  • SECS/GEM
  • Productivity/Metrics
  • Process Specific
  • Other Equipment Software Related
  • GEM300
  • EDA/Interface A
  • Cybersecurity

Equipment Types

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