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Standards
Front End Process Standards
Standard
SEMI E87 – Specification for Carrier Management (CMS)
Standard
SEMI E5 – Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II)
Standard
SEMI E37 – Specification for High-Speed SECS Message Services (HSMS) Generic Services
Standard
SEMI E30 – Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM)
Standard
SEMI E192 – Guide for Equipment Adoption Criteria for GEM and GEM-related Standards
Standard
SEMI E191 – Specification for Computing Device Cybersecurity Status Reporting
Standard
SEMI E187 – Specification for Cybersecurity of Fab Equipment
Standard
SEMI E172 – Specification for SECS Equipment Data Dictionary (SEDD)
Standard
SEMI E128 – Specification for XML Message Structures
Standard
SEMI E109 – Specification for Reticle and Pod Management
Standard
SEMI GEM 300 Standards
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