Published Papers Tagged: Design for Manufacturing

Published Paper

2025-Product Design Enhancement with Test Structures for Non-Contact Detection of Yield Detractors

Yield Management

e-Beam

Design for Manufacturing

Characterization

Published Paper

EDTM 2022 – New Method for BEOL Overlay and Process Margin Characterization

Design for Manufacturing

Voltage Contrast

Published Paper

NANOTS 2021 – Advanced High Throughput e-Beam Inspection with DirectScan

Design for Manufacturing

Voltage Contrast

Process Control

Published Paper

EDTM 2019 – Yield and Reliability Challenges at 7nm and Below

Design for Manufacturing

Characterization

Published Paper

SPIE 2009 – Simplify to Survive, prescriptive layouts ensure profitable scaling to 32nm and beyond

Design for Manufacturing

Yield Management

Published Paper

SPIE 2009 – OPC Simplification and Mask Cost Reduction Using Regular Design Fabrics

Design for Manufacturing

Yield Management

Published Paper

IEEE Transactions 2008 – Variation in Transistor Performance and Leakage in Nanometer-Scale Technologies

Characterization

Design for Manufacturing

Yield Management

Published Paper

ISSM 2006 – Method for fast and accurate calibration of litho simulator for hot spot analysis

Yield Management

Design for Manufacturing

Characterization