Introduction to the SEMI E109 Standard
SEMI E109, Specification for Reticle and Pod Management (RPMS), standardizes how semiconductor equipment manages reticles and reticle pods. It enables host systems to verify pod IDs and contents, ensuring the correct reticles are available for production. E109 also tracks reticle usage and qualification to maintain quality.
Although part of the GEM 300 standards, E109 is specific to lithography, reticle inspection, and bare reticle storage equipment. It supports both automated and manual operations and mirrors the functionality of E87 Carrier Management Services, adapted for reticle-specific workflows.
Purpose of the SEMI E109 Standard
SEMI E109 establishes a standardized interface between factory host systems and equipment that manage reticles and reticle pods. It defines key processes such as load port transfers, pod ID and content verification, and locking mechanism. The standard also covers reticle movement, identification, usage tracking, and qualification. By outlining clear state models and interaction scenarios, E109 simplifies integration and enhances consistency across diverse semiconductor tool types that use reticles.
Key Concepts and Features of SEMI E109
The SEMI E109 standard introduces a comprehensive and uniform framework for carrier management in semiconductor manufacturing. The term?pod?refers to any container used to transport reticles to and from equipment. E109 is implemented as part of the equipment’s GEM 300 interface and defines several state models and services that govern the interaction between pods and reticles.
Core State Models
SEMI E109 defines multiple state models to manage the behavior and interaction of load ports and carriers:
- Reticle Pod Load Port Transfer: Controls the operational status of reticle pod load ports, including transitions between in-service and out-of-service states. When in service, it manages reticle pod loading, unloading, and transfer blocking.
- Pod: Facilitates host system verification of pod ID and contents. It reports pod access events, completion of pod-related activities, and manages the pod locking mechanism.
- Access Mode: Configures whether pod delivery/removal is manual or automated via an Automated Material Handling System (AMHS).
- Load Port Reservation: Communicates when a pod is reserved for a specific load port.
- Load Port/Carrier Association: Reports the affiliation between a pod and a load port.
- Reticle: Manages and reports reticle qualification, particle inspection, and usage.
- Reticle Allocation: Reports when a reticle is allocated to a lot.
- Reticle Location: Reports when a reticle location is occupied.
Additional Standardized Features
Beyond state models, E109 includes several additional capabilities that enhance reticle management:
- Notifications: Provides detailed event reporting, including pod clamping/unclamping, door opening/closing, and reticle ID reader availability changes.
- Services: Defines services for reading and writing pod tags, in addition to those associated with state models.
- Roundtrip Scenarios: Describes both normal and abnormal operational scenarios, illustrating how state models and services interact.
- Internal Pod Buffers: Supports equipment with internal pod storage by defining services to request pod movement to external load ports and tracking storage.
- Alarms: Notifies the host system of unexpected carrier and load port related errors, failures, or abnormal conditions, enabling timely diagnostics and corrective actions.
- Integration with SECS/GEM: SEMI E109.1, a subordinate standard that maps SEMI E109 features to the SECS/GEM interface for communication with factory hosts.
These features collectively establish a robust and standardized execution framework for material transportation, enabling efficient and reliable operations in advanced manufacturing environments.
Importance of the SEMI E109 Standard to the Industry
The SEMI E109 standard is an important part of modern semiconductor manufacturing, enabling streamlined and automated material handling for equipment handling reticles. Its adoption delivers several key benefits:
- Enhanced Operational Efficiency: By standardizing reticle pod transfer processes and reticle qualification, E109 reduces errors, minimizes delays, and improves overall throughput and improves product quality.
- Interoperability Across Equipment and Facilities: E109 ensures consistent behavior and compatibility between pods and reticles, regardless of equipment supplier or geographic location, fostering a unified global manufacturing ecosystem.
- Cost Reduction: The standard minimizes manual interventions, reduces equipment integration complexity, and lowers downtime—resulting in significant cost savings for semiconductor manufacturers and fabrication facilities.
- Seamless Automation Integration: E109 provides a robust framework for integrating automated systems such as Automated Material Handling Systems (AMHS), which are essential for achieving fully automated, “lights-out” manufacturing environments.
- Widespread Industry Adoption: E109 is required in 300mm front-end fabrication facilities on the equipment with reticles.
The standard’s applications in reticle handling, verification, and tracking optimize manufacturing workflows, ensuring high accuracy and productivity in semiconductor fabrication.
FAQ
Can tools implement both E87 and E109?
Yes. If a tool works with carriers containing substrates and pods containing reticles, then both E87 and E109 standards apply.
PDF Products Supporting the SEMI E109 Standard
PDF offers a range of advanced connectivity and automation solutions designed to comply with SEMI Standards, including the E109 standard.
Equipment-Side
- Cimetrix CIM300: Supports GEM300 standards compliance for 300mm fabs, combining GEM, E87, E90, and other standards.
- Cimetrix CIMControlFramework: A complete software framework for equipment automation systems, designed to integrate seamlessly with SEMI standards.
- Cimetrix EquipmentConnect: A powerful software toolkit engineered for seamless implementation of SEMI GEM, GEM300, and EDA/Interface A standards
Factory-Side
- Sapience Data Platform: A host-side solution supporting SEMI standards, enabling efficient factory host operations.
- Cimetrix HostConnect: An enhanced software library for creating host applications using SECS-II messaging over HSMS.
- Cimetrix SECSConnect: A library for creating applications using SECS-II messaging over SECS-I or HSMS.
Test
- Cimetrix EquipmentTest: A comprehensive SECS/GEM testing solution engineered to validate equipment interface compliance with SEMI standards and streamline integration with factory host systems.