Introduction to the SEMI E128 Standard
The SEMI E128 standard, formally titled?Specification for XML Message Structures, defines the technical framework for XML and SOAP-based message formats used in Equipment Data Acquisition (EDA) communications. It is a foundational component of the EDA/Interface A standards (Freeze Versions 1 and 2), enabling reliable data exchange between semiconductor manufacturing equipment and factory host systems.
Purpose of the SEMI E128 Standard
The primary objective of SEMI E128 is to standardize the structure and exchange of both asynchronous and synchronous messages. By specifying XML message headers and formatting rules, the standard ensures compatibility and consistency across diverse systems. This eliminates the risk of proprietary or incompatible protocols, streamlines message transport, and enables efficient communication within highly automated manufacturing environments.
Key Concepts and Features of SEMI E128
- XML and SOAP Compliance: E128 mandates the use of XML version 1.0 and SOAP version 1.2 for message formatting, ensuring robust data encoding and transmission. It includes a schema file that developers use to build EDA-compliant software. Standards such as E125, E132, and E134 rely on the E128 schema for message structure.
- Synchronous and Asynchronous Messaging: Supports both real-time (synchronous) and event-driven (asynchronous) communication models, accommodating a wide range of data exchange requirements.
- Interoperability: Leverages established industry standards wherever possible, introducing extensions only when necessary to meet the specific needs of semiconductor manufacturing. All EDA implementations are built on the same E128 schema.
Importance of SEMI E128 to the Industry
SEMI E128 addresses key challenges in data communication by enhancing interoperability, scalability, and operational transparency:
- For Equipment Suppliers: Developers use the E128 schema to build EDA interfaces that are compatible with any fab-side EDA client software.
- For Chip Manufacturers: Fab software teams use the E128 schema to develop client applications that can reliably interface with any equipment-side EDA implementation.
- For Software Providers: Adherence to a unified messaging structure enables the development of robust, interoperable software solutions across the semiconductor ecosystem.
Widely adopted in advanced manufacturing facilities, SEMI E128 streamlines communication protocols and provides a scalable, reliable foundation for high-performance data acquisition and distribution.
PDF Solutions Products Supporting SEMI E128
All PDF Solutions EDA/Interface A products comply with SEMI E128.
Equipment-Side
- Cimetrix CIMPortal Plus: A comprehensive Software Development Kit (SDK) designed to facilitate the implementation of high-performance Equipment Data Acquisition (EDA) solutions in full compliance with applicable SEMI standards.
- Cimetrix CIMControlFramework: A complete software framework for equipment automation systems, designed to integrate seamlessly with SEMI standards.
Factory-Side
- Sapience Data Platform: A host-side solution supporting SEMI standards, enabling efficient factory host operations.
Test
- Cimetrix ECCE Plus: A robust Equipment Data Acquisition (EDA) reference client application designed to help validate equipment adherence to the SEMI EDA standards.
- Cimetrix EDATester: the premier application for validating compliance with SEMI Equipment Data Acquisition (EDA/Interface A) standards and characterizing performance in semiconductor manufacturing environments.