SEMI E142 – Specification for Substrate Mapping

Introduction to the SEMI E142 Standard  

The SEMI E142 Specification for Substrate Mapping standard defines the concept of a substrate map, which applies to various substrate types, including wafers, frames, strips, and trays. A substrate map provides a structured method for storing location-specific data related to the substrate. For instance, when the substrate is a wafer, the map can contain detailed information about each individual die. 

SEMI E142 specifies an XML schema for organizing substrate map data and outlines standardized methods for transferring these XML files between a factory’s host system and equipment via the GEM interface. Depending on the equipment, substrate maps may be required, generated, or both consumed and produced. 

Substrate maps play a critical role in enabling traceability and facilitating seamless data exchange between equipment within the manufacturing environment. 

What is the purpose of the SEMI E142 Standard? 

SEMI E142 primarily defines the structure of substrate maps and the methods for transmitting map data between a factory’s host system and an equipment’s GEM interface. The standard does not impose limitations on how the map data is used or the volume of data that can be stored. 

Because substrate maps organize data based on the physical layout of the substrate and support location-specific information, they are particularly well-suited for implementing traceability requirements. While SEMI E142 is especially applicable to assembly and packaging processes—including comprehensive semiconductor device testing—it is not limited to these use cases. Any application requiring map data for substrates such as wafers, frames, strips, or trays can leverage the E142 substrate map standard. 

What are the key concepts and features of SEMI E142? 

The SEMI E142 standard establishes a framework for managing substrate maps in semiconductor manufacturing. It encompasses several key technical components and capabilities: 

Core Components 

• Substrate Map Structure: Defines substrate maps as two-dimensional arrays representing physical substrates. The structure allows configurable origin points and axis directions, and includes sections for layout, bin codes, device IDs, transfer data, and device data maps. 
• Service Architecture: Specifies three primary services for substrate map data management including MapDownload, MapUpload, and MapGroupDownload.
  These services are implemented through subordinate standards described below. 
• Substrate Type Coverage: Supports a wide range of substrate classifications, including wafers, frames, strips, trays, tape and reel, panels, and printed circuit boards. 
• Process Integration: Empowers equipment that require substrate maps prior to processing and enables equipment that generate maps to capture processing results and analysis for individual substrate positions. 

Subordinate Standards 

While SEMI E142 defines the foundational concepts, four subordinate standards provide implementation details: 

1. SEMI E142.1 – Defines the XML schema used for substrate maps. The schema is available from SEMI at https://dom.semi.org/web/wstandards.nsf/complementaryfiles.  
2. SEMI E142.2 – Describes substrate map file transfer between equipment and host via the GEM interface. 
   • Equipment sends maps using GEM collection events and data variables. 
   • Equipment requests maps using the SEMI E39 message S14F1. 
3. SEMI E142.3 – Specifies map transfer using web services technology. This method is defined but not widely adopted. 
4. SEMI E142.4 – Introduces advanced substrate map transfer using Stream 21 messages, supporting very large map files. 

Why is the SEMI E142 Standard important to the industry? 

The SEMI E142 standard provides strategic value across the semiconductor industry. 

Benefits for Equipment Suppliers 

• Standardized schema usage across multiple factories for equipment that requires or generates substrate maps. 
• Seamless substrate map transfer via the SECS/GEM interface. 
• Enhanced ability to meet factory traceability and compliance requirements. 

Advantages for Chip Manufacturers 

• Consistent schema application across equipment from different suppliers. 
• Substrate maps support robust traceability implementations. 
• Integration with advanced analytics for correlating manufacturing and test data. 
• Improved process control and optimization of equipment operations. 

Industry-Wide Impact 

• Standardized substrate map technology enables seamless collaboration between factories and equipment suppliers worldwide. By defining a common substrate map schema and consistent data transfer methods between factory host systems and equipment, SEMI E142 facilitates efficient integration across diverse manufacturing environments. 
• Reduced supply chain disruption risks through consistent data exchange protocols. 
• Accelerated innovation in AI-driven manufacturing solutions through unified data structures. 

What PDF Solutions products support the SEMI E142 standard? 

• Cimetrix CIM142 serves as the primary solution for equipment manufacturers implementing E142 compliance, delivering comprehensive implementation support through specialized libraries, detailed documentation, and practical implementation samples. The platform enables direct substrate map visualization on manufacturing equipment and provides high-speed, low-latency pipeline capabilities for device-level assembly data collection, supporting advanced fault detection and classification (FDC) applications. 
• PDF Solutions Exensio leverages E142 standard compliance to break down manufacturing data silos, enabling engineers to identify critical relationships across manufacturing and design processes. This integration results in enhanced process control, improved product screening capabilities, and optimized equipment operations that directly support the E142 standard’s traceability and analytics objectives. 

The following can be used with Cimetrix CIM142:

• Cimetrix CIMConnect: Provides an SECS/GEM interface for equipment suppliers, enabling seamless communication with factory hosts.
• Cimetrix CIMControlFramework: A complete software framework for equipment automation systems, designed to integrate seamlessly with SEMI standards.
• Cimetrix EquipmentConnect: A powerful software toolkit engineered for seamless implementation of SEMI GEM, GEM300, and EDA/Interface A standards