Introduction to SEMI E145
SEMI E145 is a classification standard that defines XML structures for measurement unit symbols in semiconductor manufacturing environments. Published by SEMI International, this standard establishes standardized representations for measurement units used across semiconductor equipment and manufacturing processes. The specification addresses the critical need for consistent unit symbol representation in XML-based data exchange systems, providing a comprehensive framework for basic units, modified units with prefixes, and combined units derived from mathematical operations. SEMI E145 serves as a foundational standard that enables interoperability between equipment suppliers, manufacturing execution systems, and data acquisition platforms throughout the semiconductor manufacturing ecosystem.
Purpose of the SEMI E145 Standard
The primary purpose of SEMI E145 is to standardize measurement unit symbol representations in XML format for the semiconductor industry, based on units defined in SEMI E5, SEMI E6, and the International System of Units (SI). The standard provides a structured approach to represent common measurement units used in semiconductor manufacturing while establishing clear rules for adding custom symbols when equipment-specific units are required. SEMI E145 complements the Equipment Data Acquisition (EDA) implementation specified in SEMI E125, enabling equipment to publish data through alternate communication channels without relying on SECS/GEM messaging infrastructure. This standardization reduces ambiguity in data interpretation and facilitates seamless data exchange between diverse manufacturing systems and equipment platforms.
Key Concepts and Features of SEMI E145
SEMI E145 defines three fundamental unit symbol categories: Basic Units (single symbol representations such as coulomb [C] and hertz [Hz]), Modified Units (basic units with prefixes and powers like millimeter [mm] and megavolt [MV]), and Combined Units (derived from combinations of basic and modified units such as newton per meter [N/m]). The standard implements specific XML conventions to ensure parser compatibility, including representing exponents with superscript notation (m² becomes m2), replacing center dots with periods (P·s becomes P.s), and using forward slashes for denominators (m/s² becomes m/s2). Each unit object contains three core attributes: Symbol (unique text identifier), Name (full unit name), and Description (detailed unit definition). The specification includes comprehensive tables covering 80+ basic units, 30+ modified units with SI prefixes, and 60+ combined units commonly used in semiconductor manufacturing processes.
Industry Significance and Applications
SEMI E145 establishes critical standardization for measurement data exchange across semiconductor manufacturing operations, enabling consistent interpretation of process parameters, equipment specifications, and quality metrics. The standard supports equipment suppliers by providing a unified framework for reporting sensor data, process measurements, and equipment capabilities without ambiguity. Chip manufacturers benefit from standardized data formats that facilitate integration between diverse equipment platforms and manufacturing execution systems. Software suppliers can develop applications with confidence that measurement units will be consistently represented across different equipment interfaces. The standard is particularly valuable for facilities requirements specification, process characterization, and data analytics applications where precise unit identification is essential for accurate analysis and decision-making.
PDF Solutions Equipment Products Supporting SEMI E145
Specific information regarding our products that support the SEMI E145 standard requires direct consultation with our technical documentation and product specifications. Organizations seeking detailed implementation guidance for SEMI E145 compliance should contact us directly for comprehensive product capabilities and integration support.