Introduction to the SEMI E172 Standard
The SEMI E172 standard, “Specification for SECS Equipment Data Dictionary (SEDD),” standardizes the approach for documenting an equipment’s GEM (SEMI E30) interface in a way that is both human- and computer-readable. Introduced to enhance communication efficiency between equipment and factory software systems, SEDD uses XML to define the format and content of datasets that describe the key elements of the SECS-II (SEMI E5) interface for production equipment. This standard complements traditional interface documentation rather than replacing it.
Purpose of the SEMI E172 Standard
The primary goal of the SEMI E172 standard is to simplify and improve the integration and communication between manufacturing equipment and factory control systems. By creating a unified format for the elements of the GEM interface, this specification enables equipment suppliers to provide comprehensive, accurate, and consistent documentation. Since factories can write software to read SEDD files, they can create intelligent host applications that automatically configure themselves and adapt to a specific GEM interface. Ultimately, this results in faster deployment of automated systems.
Key Concepts and Features of SEMI E172
- Structured Dataset: Provides a common XML schema that organizes elements such as collection events, data variables, alarms, equipment constants, and recipe variable parameters in a consistent format.
- Human and Machine Readability: Ensures the documentation is accessible to both software systems and human stakeholders, promoting seamless integration and understanding.
- SEDD (SECS Equipment Data Dictionary): Enables precise documentation of SECS-II interface data in a way that is actionable for integration and application software developers.
- XML Compatibility: Enables use of widely supported XML tools to create, validate, read, and transform data files for easy usability.
Importance of SEMI E172 to the Industry
The SEMI E172 standard delivers substantial value across the semiconductor manufacturing sector, from equipment suppliers to software developers and chipmakers.
- For Equipment Suppliers: Simplifies compliance with SECS-II and GEM interface requirements and drastically reduces the time needed to prepare interface documentation.
- For Chipmakers: Provides a clear, standardized way to integrate new equipment into factories, reducing integration and acceptance time and increasing production up time.
- For Software Developers: Accelerates the creation of factory software interfaces by providing a detailed data framework.
- For Manufacturing: Drives operational efficiency by facilitating robust, automated communication between systems and equipment, critical for Smart Manufacturing initiatives.
PDF Soltuions Products Supporting SEMI E172
PDF Solutions offers a suite of tools to support and implement the SEMI E172 standard within semiconductor manufacturing operations. Key solutions include:
- Cimetrix CIMConnect: Provides an SECS/GEM interface for equipment suppliers, enabling seamless communication with factory hosts.
- Cimetrix CIM300: Supports GEM300 standards compliance for 300mm fabs, combining GEM, E87, E90, and other standards.
These solutions ensure seamless integration and compliance for manufacturers at any stage of their automation process.