Introduction to the SEMI E5 Standard
The SEMI E5 Standard, also known as SECS-II (Specification for SEMI Equipment Communications Standard 2 Message Content), defines the binary structure, interpretation, and handling of messages exchanged between intelligent manufacturing equipment and host systems. While technically an equipment can implement SECS-II standalone, it is much more appropriate to implement a GEM or GEM 300 interface that utilizes an appropriate subset of the SECS-II standard and clarifying use cases. SEMI standard E192 guides equipment suppliers to determine which of the dozens of standards to implement that are all based on SECS-II technology.
Purpose of the SEMI E5 Standard
The primary goal of SEMI E5 is to define core technology used by other standards and streamline the communication between manufacturing equipment and host systems. It enables consistent software development for hosts with minimal customization for specific equipment, simplifying integration of equipment into the factory. This standard defines a generic, binary message communication layer that is compatible with protocol standards SEMI E4 (SECS=I) and SEMI E37 (HSMS). Finally, this standard defines standard messages that include the most common activities at a factory to minimize or eliminate the need for custom messages.
Key Concepts and Features of SEMI E5
- Message Organization: Messages are grouped into “streams” (categories of activity) and “functions” (specific tasks) to ensure clarity and functionality. Each message definition is identified by the combination of a stream number and function number, such as ‘S1F13’.
- Data Structures: SECS-II employs a binary, self-describing data format using “items” and “lists of items” to structure messages. An element within a message can be any common data type like integer, floating point, binary or Boolean or it can be more complex like an array, string or structure. A Data Item Dictionary table in SECS-II defines the element from every standard message. A Variable Dictionary table defines specific data that equipment can make available through the SECS-II interface, some of which are referenced in other standards like SEMI E30 (GEM).
- Transaction and Conversation Protocols: Rules define the message exchange for all possible types of conversations. Timeouts define the behavior when the duration of a specific activity is too long.
- Message Detail: The standard defines a large library of standard messages for host and equipment to send, including primary and reply messages. Other standards like SEMI E30 (GEM) and SEMI E40 (a GEM 300 standard) describe use cases and scenarios for specific messages from this library. While custom messages can be implemented by host and equipment, only the standard messages referenced by GEM and other standards should be used in most situations.
- Units of Measure: Standardized text to document common units for typical data published by an equipment.
Importance of the SEMI E5 Standard to the Industry
The SEMI E5 Standard is pivotal for driving efficiency, interoperability, and technological advancements in the semiconductor industry. Key benefits include:
- For Equipment Suppliers: Defines core software technology for implementing a SECS/GEM or GEM 300 interface that enables equipment suppliers to provide the same solution to all factories.
- For Factories: Improves equipment integration, enabling automation, process monitoring, and production tracking by allowing the factory software to use the same core software technology to communicate with equipment from different suppliers.
- For Software Providers: Facilitates the development of flexible communication software in the factory to control equipment and collect information from the equipment.
By enabling seamless communication among automated systems, SEMI E5 enhances operational efficiency, reduces operational costs, and supports innovation in manufacturing.
PDF Solutions Products that Support SEMI E5
PDF Solutions provides comprehensive solutions to support the implementation of SEMI E5 standards, including development and integration tools for equipment-to-host communication.
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Equipment-Side
- Cimetrix CIMConnect: Provides an SECS/GEM interface for equipment suppliers, enabling seamless communication with factory hosts.
- Cimetrix CIM300: Supports GEM300 standards compliance for 300mm fabs, combining GEM, E87, E90, and other standards.
- Cimetrix CIMControlFramework: A complete software framework for equipment automation systems, designed to integrate seamlessly with SEMI standards.
- Cimetrix EquipmentConnect: A powerful software toolkit engineered for seamless implementation of SEMI GEM, GEM300, and EDA/Interface A standards
Factory-Side
- Sapience Data Platform: A host-side solution supporting SEMI standards, enabling efficient factory host operations.
- Cimetrix HostConnect: An enhanced software library for creating host applications using SECS-II messaging over HSMS.
- Cimetrix SECSConnect: A library for creating applications using SECS-II messaging over SECS-I or HSMS.
Test
- Cimetrix EquipmentTest: A comprehensive SECS/GEM testing solution engineered to validate equipment interface compliance with SEMI standards and streamline integration with factory host systems.
These products empower equipment suppliers and manufacturers to ensure seamless integration and compliance with the SEMI E5 standard, enhancing manufacturing effectiveness. The SEMI E5 Standard underpins communication in automated semiconductor manufacturing, enhancing efficiency, reducing costs, and enabling seamless integration of complex systems. Adopting the standard and leveraging innovative Cimetrix products will strategically position your organization for operational excellence and competitive advantage.