Introduction to the SEMI E94 Standard
The SEMI E94 Standard, titled Specification for Control Job Management (CJM), defines the concept of a control job that defines to queue, manage, and execute multiple SEMI E40 “Process Jobs” to optimize recipe execution in manufacturing equipment. Control jobs also determine where material is moved after processing. E94 is one of the GEM300 standards initially designed for automating tools in 300mm semiconductor front-end factories yet can be implemented on equipment in other industries.
Purpose of the SEMI E94 Standard
The primary goal of the SEMI E94 Standard is to define control jobs that manage SEMI E40 process jobs and to give the factory control supervisory control over the equipment’s recipe execution. SEMI E94 is only useful when implemented in conjunction with SEMI E40.
Key Concepts and Features of SEMI E94
Here are specific features defined in SEMI E94.
- Process Job Management: Dictate the order of process job execution. Process jobs can be integrated to execute sequentially or in parallel. Allow a set of process jobs to be started, paused, aborted, cancelled or stopped.
- Processed Material Destination: Attributes in the control job determine where processed substrates are moved, such as the source carrier, a destination carrier, or based on a sorting algorithm.
- Integration with SECS/GEM: SEMI E94.1, a subordinate standard that maps SEMI E94 features to the SECS/GEM interface for communication with factory hosts.
Importance of the SEMI E94 Standard to the Industry
The SEMI E94 standard is essential for driving operational efficiency, flexibility, and scalability in semiconductor manufacturing. It provides a standardized framework that supports advanced automation and dynamic production control. Key benefits include:
- Operational Efficiency: E94 enables factory automation by standardizing job queues, remote job control, and material routing—streamlining production and reducing manual intervention.
- Enhanced Flexibility: The standard allows fabs to dynamically adjust order priorities and manage workflows based on real-time production needs. It provides a consistent method for instructing equipment on material movement across a wide range of use cases.
- Widespread Industry Adoption: E94 is universally implemented in 300mm front-end fabrication facilities and is seeing growing adoption in back-end semiconductor operations.
These capabilities make SEMI E94 a critical enabler for high-throughput, adaptive manufacturing environments, helping fabs remain competitive in a rapidly evolving industry.
PDF Solutions Products that Support SEMI E94
PDF Solutions provides comprehensive solutions to support the implementation of SEMI E5 standards, including development and integration tools for equipment-to-host communication.
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Equipment-Side
- Cimetrix CIM300: Supports GEM300 standards compliance for 300mm fabs, combining GEM, E87, E90, and other standards.
- Cimetrix CIMControlFramework: A complete software framework for equipment automation systems, designed to integrate seamlessly with SEMI standards.
- Cimetrix EquipmentConnect: A powerful software toolkit engineered for seamless implementation of SEMI GEM, GEM300, and EDA/Interface A standards
Factory-Side
- Sapience Data Platform: A host-side solution supporting SEMI standards, enabling efficient factory host operations.
- Cimetrix HostConnect: An enhanced software library for creating host applications using SECS-II messaging over HSMS.
- Cimetrix SECSConnect™: A library for creating applications using SECS-II messaging over SECS-I or HSMS.
Test
- Cimetrix EquipmentTest: A comprehensive SECS/GEM testing solution engineered to validate equipment interface compliance with SEMI standards and streamline integration with factory host systems.