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Equipment Metadata Browsing

Explore equipment metadata models with a user-friendly interface that helps users understand available data and equipment capabilities prior to deploying data collection strategies.

Data Collection Plan (DCP) Management

Define, configure, and activate DCPs to establish structured data acquisition tailored to specific equipment and process requirements.

Multi-Format Data Visualization

Visualize collected data in various formats—including raw data, tabular views, and strip charts—to support diverse analysis workflows.

Advanced Diagnostic Capabilities

Leverage built-in diagnostics and detailed SOAP message logging to identify and troubleshoot compliance issues in equipment implementations.

Data Export Functionality

Export collected data automatically to CSV files for further analysis using external tools, enabling seamless integration with existing data pipelines.

Dual Freeze Version Compatibility

Support for both Freeze Version 1 (1105) and Freeze Version 2 (0710) to ensure compatibility across equipment generations.

Specifications

  • Supported SEMI Standards
    • SEMI E125 (Equipment Data Acquisition)
    • SEMI E132 (EDA Interface Specification)
    • SEMI E134 (Data Collection Management)
    • EDA Freeze Version 1 (1105)
    • EDA Freeze Version 2 (0710)
  • System Requirements
    • Operating System: Windows with .NET 3.5 SP1
    • Hard Drive Space: 100 MB minimum
    • Memory: 2GB RAM minimum
    • Processor: 2GHz Dual Core CPU minimum
    • Network Protocols: TCP/IP
  • Data Export Formats:
    • CSV (Comma Separated Values)
    • Raw data logging
    • SOAP message logging

Support

Our solution includes training resources, sample applications, and detailed documentation to accelerate development. Cimetrix’s global support team is available to assist engineers during critical implementation stages, ensuring a smooth and successful deployment.

Frequently Asked Questions

  1. What is the primary purpose of ECCE Plus?
    ECCE Plus is a comprehensive validation tool for equipment-side implementations of EDA/Interface A. It enables OEMs and semiconductor fabs to verify equipment connectivity, validate message formats, and ensure compliance with SEMI EDA standards prior to deployment in production environments.
  2. Which EDA Freeze Versions does ECCE Plus support?
    ECCE Plus supports both EDA Freeze Version 1 (1105) and Freeze Version 2 (0710), ensuring compatibility across a wide range of equipment generations and implementation strategies.
  3. Can ECCE Plus export data for external analysis?
    ECCE Plus includes robust data export capabilities, allowing users to save collected data in CSV format for further analysis using external tools and integration with existing data workflows.
  4. What diagnostic capabilities does ECCE Plus provide?
    ECCE Plus offers advanced diagnostics including:

    • Full SOAP message logging
    • Schema validation
    • Equipment metadata browsin
    • Detailed analysis tools to identify and resolve compliance issues with SEMI EDA standards
  5. What are the minimum system requirements for ECCE Plus?
    • Operating System: Windows with .NET Framework 4.8
    • Installer: Windows Installer 4.5 or newer
    • Storage: 100 MB minimum, plus additional space for logging
    • Memory: 2 GB RAM
    • Processor: 2 GHz Dual-Core CPU
    • Network: TCP/IP protocol support
  6. How does ECCE Plus support Data Collection Plan (DCP) management?
    ECCE Plus provides full-featured DCP management tools, allowing users to:

    • Define custom data collection parameters
    • Activate and monitor DCPs in real-time
    • Visualize data in tabular and strip chart formats
    • Copy DCPs between compatible equipment, provided the required data is available on both systems