Real-time data analytics to maximize yield, improve equipment performance, and minimize waste in your semiconductor manufacturing environment. Can be used in parallel with existing process control tools. Bring up new fabs with matching performance to a baseline fab quickly and easily.
#1 in Fault Detection and Classification (FDC)
The Process Control (C-Ops) module is the market leader in FDC with over 40,000 manufacturing tools managed by P-Ops worldwide at 6”, 8” and 12” fabs. Support for hundreds of makes and models of semiconductor manufacturing equipment.
Powerful and Efficient Fab-Centric Model
PDF Solutions has a unique top-down approach to fab modeling. Our fab-centric process control approach leverages both front-end and back-end data that is automatically collected and integrated via DEX (data exchange network) to provide powerful signature analysis and diagnostics. This approach enables more efficient deployment versus a “per tool” distributed deployment and enables decision and control at the tool and factory level.
Excursion Diagnostics and Variability Control
Automated detection of excursion events with FDC tool sensor level diagnostics and drilldown to perform process and metrology shifts, parametric drift, preventative maintenance and consumable event detection.
One-step parameter screening with advanced diagnostics to drive response correlations to feedback to tool control (dynamic SPC) for yield, device parametrics, and metrology
Quick Highlights of Process Control
Conventional FDC capabilities
Use your existing sensor collectors or use ours
Offline model creation and simulation
Real-time interactive reporting
OCAP (out of control action plan) alarms
Combine summary and real-time FDC data
Ready to get started?
Do you want to learn more about the industry's leading FDC application? Request a demo today!
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